Equipment

  • White light and 3-wavelength interferometers for the testing of discontinuous surface profiles in the micro region
  • Fizeau interferometer for the testing of plane surfaces
  • Twyman-Green interferometer for the testing of micro lenses in reflected light (sphericity, radius)
  • Mach-Zehnder interferometer for the testing of micro lenses in transmitted light (wave aberrations, PSF, MTF, focal length, NA)
  • Grazing incidence interferometer for the testing of acylindrical lenses for the beam shaping of semiconductor laser bars
  • Shack-Hartmann sensor for wavefront testing